Nonlinear Variation Decomposition of Neural Networks for Holistic Semiconductor Process Monitoring

Today's article comes from the journal of Advanced Intelligent Systems. The authors are Yun et al., from Pohang University of Science and Technology, in South Korea. In this paper they use nonlinear variation decomposition to identify failure points in semiconductor manufacturing. Today's episode is hosted by Brett Beckermann.

DOI: 10.1002/aisy.202300920

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